A lithographic (litho) hotspot is a defect on a wafer that is created during manufacturing by a combination of systematic process variation and resolution enhancement technology (RET) limitations.

Recent advances in flow sensing have resulted in more accurate, durable, and economical meters. Increasingly important is the ability to interface meters with a computer for instantaneous flow readout ...

Flow is controlled by either throttling or diverting it. Throttling involves reducing orifice size until all of the flow cannot pass through the orifice; bypassing involves routing part of the flow ...